Water treatment based on atomically engineered materials: Atomic layer deposition and beyond - ScienceDirect
Catalyst Design with Atomic Layer Deposition | ACS Catalysis
Atomic Layer Deposition of Intermetallic Fe4Zn9 Thin Films from Diethyl Zinc | Chemistry of Materials
Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond - Mattinen - 2021 - Advanced Materials Interfaces - Wiley Online Library
Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry | Scientific Reports
Atomic layer Deposition - A semiconductor solution | GP Plasma
Coatings | Free Full-Text | Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor
Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It | ACS Materials Au
Nanomaterials | Free Full-Text | Synthesis of High Surface Area—Group 13—Metal Oxides via Atomic Layer Deposition on Mesoporous Silica
Full article: Atomic layer deposition (ALD) of palladium: from processes to applications
Materials | Free Full-Text | Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source
Coating strategies for atomic layer deposition
How Atomic Layer Deposition Works
Catalysts via Atomic Layer Deposition | SpringerLink
Numerical simulation of atomic layer deposition for thin deposit formation in a mesoporous substrate - Zhuang - 2021 - AIChE Journal - Wiley Online Library
Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films | ACS Applied Materials & Interfaces
Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry | Scientific Reports
![PDF] An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies. | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/7dae8a6ce9ec44e5b0481f0eac178a86c19f236c/5-Figure2-1.png "PDF] An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies. | Semantic Scholar")
PDF] An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies. | Semantic Scholar
About the importance of purge time in molecular layer deposition of alucone films - Dalton Transactions (RSC Publishing) DOI:10.1039/D1DT00623A
Can We Rationally Design and Operate Spatial Atomic Layer Deposition Systems for Steering the Growth Regime of Thin Films? | The Journal of Physical Chemistry C
Numerical simulation of atomic layer deposition for thin deposit formation in a mesoporous substrate - Zhuang - 2021 - AIChE Journal - Wiley Online Library
Atomic/molecular layer deposition for energy storage and conversion - Chemical Society Reviews (RSC Publishing) DOI:10.1039/D0CS00156B
