Sensors | Free Full-Text | Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer
How do interferometric systems work?
Laser Stage Technology | Sample Positioning Control
Displacement Sensor - interferometer with nanometer accuracy
What are interferometric laser encoders and where are they used?
Three-dimensional interferometric stage encoder using a single access port - ScienceDirect