Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability - Journal of Materials Chemistry (RSC Publishing)
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Atomic layer deposition of hafnium oxide dielectrics on silicon and germanium substrates | Journal of Materials Science: Materials in Electronics
Atomic layer deposition of hafnium silicate film for high mobility pentacene thin film transistor applications - Journal of Materials Chemistry (RSC Publishing)
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Applied Sciences | Free Full-Text | Substrate-Driven Atomic Layer Deposition of High-κ Dielectrics on 2D Materials
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Frontiers | Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water
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A theoretical study of the atomic layer deposition of HfO2 on Si(1 0 0) surfaces using tetrakis(ethylmethylamino) hafnium and water - ScienceDirect
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Atomic Layer Deposition of Hafnium(IV) Oxide on Graphene Oxide: Probing Interfacial Chemistry and Nucleation by using X‐ray Absorption and Photoelectron Spectroscopies - Alivio - 2015 - ChemPhysChem - Wiley Online Library
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Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-mir21A axis while inhibits osteoclasts activity | Journal of Nanobiotechnology | Full Text
Hafnium Oxide/Graphene/Hafnium Oxide-Stacked Nanostructures as Resistive Switching Media | ACS Applied Nano Materials
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PDF] Resolving the Nucleation Stage in Atomic Layer Deposition of Hafnium Oxide on Graphene. | Semantic Scholar
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Atomic Layer Deposition principle (Reproduced with permission from ref. 9). | Download Scientific Diagram
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Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-mir21A axis while inhibits osteoclasts activity | Journal of Nanobiotechnology | Full Text
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PDF] Properties of the lanthanum hafnium oxide ( LHO ) films deposited by electron cyclotron resonance-atomic layer deposition ( ECR-ALD ) | Semantic Scholar
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Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-mir21A axis while inhibits osteoclasts activity | Journal of Nanobiotechnology | Full Text
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Atomic layer deposition of zirconium oxide thin films | Journal of Materials Research | Cambridge Core
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PPT - Study of Hafnium Dioxide (HfO 2 ) by Atomic Layer Deposition (ALD) PowerPoint Presentation - ID:249498
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High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography | Nano Research
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Self-cleaning and surface chemical reactions during hafnium dioxide atomic layer deposition on indium arsenide | Nature Communications
Influence of Substrates on Structure Development and Concentration of Residual Impurities in Hafnium–Titanium-Oxide Films Grown by Atomic Layer Deposition | Crystal Growth & Design
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