Full article: New development of atomic layer deposition: processes, methods and applications
RMS roughness of ALD-Al 2 O 3 thin films | Download Table
Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices | ACS Applied Nano Materials
Coatings | Free Full-Text | Aluminum Nitride Nanofilms by Atomic Layer Deposition Using Alternative Precursors Hydrazinium Chloride and Triisobutylaluminum
Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices | ACS Applied Nano Materials
X-ray reflectometry (XRR) measurement on atomic layer deposition (ALD)... | Download Scientific Diagram
Coatings | Free Full-Text | Influence of Substrate Materials on Nucleation and Properties of Iridium Thin Films Grown by ALD
Influence of growth temperature on dielectric strength of Al2O3 thin films prepared via atomic layer deposition at low temperature | Scientific Reports
Atomic Layer Deposition (ALD) Journal, News and Community
Dopamine-Assisted Layer-by-Layer Deposition Providing Coatings with Controlled Thickness, Roughness, and Functional Properties | ACS Omega
Self-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition | Nature Communications
Coatings | Free Full-Text | Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices | ACS Applied Nano Materials
Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry | Chemistry of Materials
shows the surface roughness of the films deposited at various... | Download Scientific Diagram
Noble metal alloy thin films by atomic layer deposition and rapid Joule heating | Scientific Reports
The schematic of atomic layer deposition (ALD) process and ALD... | Download Scientific Diagram
Atomic Layer Deposition (ALD) Analysis | Thin Films | EAG
Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices | ACS Applied Nano Materials
Nanomaterials | Free Full-Text | Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
